Brooks Automation 001-4130-03 Wafer Pre-Aligner Controller

Brooks Automation 001-4130-03 is a high-precision wafer pre-aligner controller designed for semiconductor cleanroom fabrication equipment. It controls the pre-aligner unit to identify wafer notch or flat edge and complete accurate positioning before robotic transfer.

This dedicated motion controller supports 200mm and 300mm wafer formats with micron-level alignment repeatability. It is widely used as spare parts for wafer handler, lithography and etching equipment maintenance and upgrade in fabs.

Data Parameters

• 1. Brand: Brooks Automation.

• 2. Model: 001-4130-03.

• 3. Product Type: Wafer Pre-Aligner Motion Controller.

• 4. Application: Semiconductor wafer handling and pre-alignment system.

• 5. Feature: High precision edge detection, notch alignment, closed-loop motion control.

• 6. Characteristic: Support 200mm / 300mm wafer, cleanroom compatible design.

• 7. Communication: RS232, Ethernet for host equipment interconnection.

• 8. Package: Integrated controller unit with multi-port terminal connectors.

• 9. Mounting: Installed inside wafer handler or pre-aligner cabinet.

• 10. Operating Temperature: 15℃ ~ +30℃, cleanroom environment.

Core Functions

• 1. Detect wafer edge, flat or notch feature to calculate angular and positional offset.

• 2. Drive rotation and translation stages to adjust wafer into standard pre-aligned position.

• 3. Output alignment ready signal to wafer robot for subsequent pick-and-place operation.

• 4. Real-time status monitoring and fault alarm for jam, mis-detection and sensor failure.

• 5. Exchange alignment data and recipe parameters with upper semiconductor process equipment.

Application Scenarios

• 1. Semiconductor fab wafer handler pre-aligner spare replacement and maintenance.

• 2. Lithography, etching and deposition equipment wafer transfer system renovation.

• 3. 200mm / 300mm wafer automation handling platform spare inventory backup.

• 4. Old Brooks pre-aligner control system upgrade and function migration project.

• 5. Microelectronics cleanroom precision motion control equipment renewal.

FAQ

• 1. Q: What is Brooks Automation 001-4130-03?
      A: It is a dedicated controller for semiconductor wafer pre-aligner to realize wafer notch and edge positioning.

• 2. Q: Which wafer sizes does it support?
      A: It is compatible with standard 200mm and 300mm silicon wafers for mainstream fabs.

• 3. Q: Can it be replaced while the host equipment is running?
      A: Shut down equipment and cut off DC power before replacement to avoid wafer collision risk.